10 February 2017 Design and implementation of a cloud based lithography illumination pupil processing application
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Proceedings Volume 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016); 102501Z (2017) https://doi.org/10.1117/12.2266903
Event: Fourth International Conference on Optical and Photonics Engineering, 2016, Chengdu, China
Abstract
Pupil parameters are important parameters to evaluate the quality of lithography illumination system. In this paper, a cloud based full-featured pupil processing application is implemented. A web browser is used for the UI (User Interface), the websocket protocol and JSON format are used for the communication between the client and the server, and the computing part is implemented in the server side, where the application integrated a variety of high quality professional libraries, such as image processing libraries libvips and ImageMagic, automatic reporting system latex, etc., to support the program. The cloud based framework takes advantage of server’s superior computing power and rich software collections, and the program could run anywhere there is a modern browser due to its web UI design. Compared to the traditional way of software operation model: purchased, licensed, shipped, downloaded, installed, maintained, and upgraded, the new cloud based approach, which is no installation, easy to use and maintenance, opens up a new way. Cloud based application probably is the future of the software development.
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Youbao Zhang, Xinghua Ma, Jing Zhu, Fang Zhang, Huijie Huang, "Design and implementation of a cloud based lithography illumination pupil processing application", Proc. SPIE 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016), 102501Z (10 February 2017); doi: 10.1117/12.2266903; https://doi.org/10.1117/12.2266903
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