QCL seeded, ns-pulse, multi-line, CO2 laser oscillator for laser-produced-plasma extreme-UV source

Krzysztof Michał Nowak; Takashi Suganuma; Yoshiaki Kurosawa; Takeshi Ohta; Yasufumi Kawasuji; Hiroaki Nakarai; Takashi Saitou; Junichi Fujimoto; Hakaru Mizoguchi; Akira Sumitani; Akira Endo

doi:10.1117/12.2256003

13 January 2017 QCL seeded, ns-pulse, multi-line, CO₂ laser oscillator for laser-produced-plasma extreme-UV source

Krzysztof Michał Nowak, Takashi Suganuma, Yoshiaki Kurosawa, Takeshi Ohta, Yasufumi Kawasuji, Hiroaki Nakarai, Takashi Saitou, Junichi Fujimoto, Hakaru Mizoguchi, Akira Sumitani, Akira Endo

Author Affiliations +

Proceedings Volume 10254, XXI International Symposium on High Power Laser Systems and Applications 2016; 102540W (2017) https://doi.org/10.1117/12.2256003
Event: XXI International Symposium on High Power Laser Systems and Applications, 2016, Gmunden, Austria

Abstract

Successful merger of state-of-the-art, semiconductor quantum-cascade lasers (QCL), with the mature CO₂ laser technology, resulted in a delivery of highly-desired qualities of CO2 laser output that were not available previously without much effort. These qualities, such as multi-line operation, excellent spectro-temporal stability and pulse waveform control, became available from a single device of moderate complexity. This paper describes the operation principle and the unique properties of the solid{state seeded CO₂ laser, invented for an application in laser-produced-plasma (LPP), extreme-UV (EUV) light source.

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Krzysztof Michał Nowak, Takashi Suganuma, Yoshiaki Kurosawa, Takeshi Ohta, Yasufumi Kawasuji, Hiroaki Nakarai, Takashi Saitou, Junichi Fujimoto, Hakaru Mizoguchi, Akira Sumitani, and Akira Endo "QCL seeded, ns-pulse, multi-line, CO₂ laser oscillator for laser-produced-plasma extreme-UV source", Proc. SPIE 10254, XXI International Symposium on High Power Laser Systems and Applications 2016, 102540W (13 January 2017); https://doi.org/10.1117/12.2256003

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