13 January 2017 QCL seeded, ns-pulse, multi-line, CO2 laser oscillator for laser-produced-plasma extreme-UV source
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Proceedings Volume 10254, XXI International Symposium on High Power Laser Systems and Applications 2016; 102540W (2017) https://doi.org/10.1117/12.2256003
Event: XXI International Symposium on High Power Laser Systems and Applications, 2016, Gmunden, Austria
Abstract
Successful merger of state-of-the-art, semiconductor quantum-cascade lasers (QCL), with the mature CO2 laser technology, resulted in a delivery of highly-desired qualities of CO2 laser output that were not available previously without much effort. These qualities, such as multi-line operation, excellent spectro-temporal stability and pulse waveform control, became available from a single device of moderate complexity. This paper describes the operation principle and the unique properties of the solid{state seeded CO2 laser, invented for an application in laser-produced-plasma (LPP), extreme-UV (EUV) light source.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Krzysztof Michał Nowak, Takashi Suganuma, Yoshiaki Kurosawa, Takeshi Ohta, Yasufumi Kawasuji, Hiroaki Nakarai, Takashi Saitou, Junichi Fujimoto, Hakaru Mizoguchi, Akira Sumitani, Akira Endo, "QCL seeded, ns-pulse, multi-line, CO2 laser oscillator for laser-produced-plasma extreme-UV source", Proc. SPIE 10254, XXI International Symposium on High Power Laser Systems and Applications 2016, 102540W (13 January 2017); doi: 10.1117/12.2256003; https://doi.org/10.1117/12.2256003
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