8 March 2017 Development of atmospheric pressure plasma torch for the fabrication of freeform optics
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Proceedings Volume 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016; 102550P (2017) https://doi.org/10.1117/12.2267633
Event: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 2016, Jinhua, Suzhou, Chengdu, Xi'an, Wuxi, China
Abstract
Freeform optics especially Continues Phase Plate, are greatly demanded in high power laser systems. Fabrication of them with high efficiency and low sub-surface damage becomes a major challenge. Atmospheric pressure plasma processing using radicals produced by plasma torch, which has strong potential for machining freeform optics with millimeter and sub-millimeter spatial resolution, is proposed. This paper presents a novel plasma torch designed for fabricating freeform optics. This integral compact torch is comprised of needle electrode and micro-hole electrode. Millimeter-scale plasma jet of different size can be obtained by changing the micro-hole electrode. To analyze the process distribution of process gas of the jet flow, flow simulation is performed using COMSOL Multiphysics software. A set of single factor experiments are conducted to reveal the relationship between removal characteristics and flow rate of He, CF4 and O2. The removal rate with adding O2 increases 7 times of that without O2, and the spectrum change of the plasma jet is observed. It indicates that O2 improves removal rate through consuming existing CFx to produce more F radicals. The removal rate and full width at half maximum (FWHM) of typical removal function is about 19 μm/min-2.2 mm and 18 μm/min-1.1 mm respectively.
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Xing Su, Xing Su, Qiang Xin, Qiang Xin, Yuanhang Liu, Yuanhang Liu, Longguang Xia, Longguang Xia, Bo Wang, Bo Wang, } "Development of atmospheric pressure plasma torch for the fabrication of freeform optics", Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102550P (8 March 2017); doi: 10.1117/12.2267633; https://doi.org/10.1117/12.2267633
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