8 March 2017 Development of key technologies in the fabrication of large aperture off-axis wedge focusing lens
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Proceedings Volume 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016; 102551C (2017) https://doi.org/10.1117/12.2267413
Event: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 2016, Jinhua, Suzhou, Chengdu, Xi'an, Wuxi, China
Abstract
In order to achieve the high precision fabrication of the large-aperture off-axis Wedged Focus Lens (WFL) for high power laser device, the involved fabrication technologies including the ultra precision grinding, the high efficiency polishing and the deterministic polishing, have been explored in this paper. Firstly, based on the configuration characteristic of WFL, the parallel grinding theory and the calculation method of CNC program were introduced. Secondly, the main factors affecting the removal efficiency were investigated and analyzed by orthogonal approach experiment in the high efficiency polishing process, which can be used for the quality control. Then, the methods for maintaining the stability of removal function and restraining the surface ripple were investigated during deterministic polishing process. Finally, a 430mm×430mm off-axis Wedged Focus Lens was manufactured using the above technologies, and the results indicated that, after polishing, the P-V, RMS, GRMS, PSD RMS1, PSD RMS2 and Rq are 0.097λ, 0.012λ (λ=632.8 nm), 5.851 nm/cm, 2.325 nm, 0.541 nm and 0.21 nm, respectively, which meet the requirement of high power laser device. Consequently, the effectiveness of the proposed key technologies is proved.
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Xian-hua Chen, Xian-hua Chen, Hua-dong Yu, Hua-dong Yu, Bo Zhong, Bo Zhong, Rui-qing Xie, Rui-qing Xie, Lian Zhou, Lian Zhou, } "Development of key technologies in the fabrication of large aperture off-axis wedge focusing lens", Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102551C (8 March 2017); doi: 10.1117/12.2267413; https://doi.org/10.1117/12.2267413
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