In order to achieve the high precision fabrication of the large-aperture off-axis Wedged Focus Lens (WFL) for high
power laser device, the involved fabrication technologies including the ultra precision grinding, the high efficiency
polishing and the deterministic polishing, have been explored in this paper. Firstly, based on the configuration
characteristic of WFL, the parallel grinding theory and the calculation method of CNC program were introduced.
Secondly, the main factors affecting the removal efficiency were investigated and analyzed by orthogonal approach
experiment in the high efficiency polishing process, which can be used for the quality control. Then, the methods for
maintaining the stability of removal function and restraining the surface ripple were investigated during deterministic
polishing process. Finally, a 430mm×430mm off-axis Wedged Focus Lens was manufactured using the above
technologies, and the results indicated that, after polishing, the P-V, RMS, GRMS, PSD RMS1, PSD RMS2 and Rq are
0.097λ, 0.012λ (λ=632.8 nm), 5.851 nm/cm, 2.325 nm, 0.541 nm and 0.21 nm, respectively, which meet the requirement
of high power laser device. Consequently, the effectiveness of the proposed key technologies is proved.