8 March 2017 Fabrication of the metal wire-grid polarizer in visible light
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Proceedings Volume 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016; 102554K (2017) https://doi.org/10.1117/12.2268374
Event: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 2016, Jinhua, Suzhou, Chengdu, Xi'an, Wuxi, China
Abstract
The polarization characteristics of the metal wire-grid polarizer are investigated by Finite Difference Time Domain method. To achieve a high extinction ratio and transmissivity in visible light, the metal wire-grid profile was optimized. The simulation results show that the period should be less than 200 nm. When the period, the glass substrate etching depth and the Al groove depth of metal wire-grid were at 180nm, 20nm and 120nm respectively, the extinction ratio could reach the maximum 40 dB; the transmissivity could reach the maximum 85%. Herein, considering the high reflection of metal aluminum in the manufacturing process, we propose using the copper as anti-reflection coating. Finally, a prototype of the metal wire-grid polarizer has been fabricated by holographic-immersion lithography and ion beam etching.
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Quan Liu, Jianhong Wu, Yang Zhou, "Fabrication of the metal wire-grid polarizer in visible light", Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102554K (8 March 2017); doi: 10.1117/12.2268374; https://doi.org/10.1117/12.2268374
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