8 March 2017 Design and fabrication of deformable mirror driven by piezoelectric buzzer array
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Proceedings Volume 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016; 102555F (2017) https://doi.org/10.1117/12.2267774
Event: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 2016, Jinhua, Suzhou, Chengdu, Xi'an, Wuxi, China
Abstract
A low-cost deformable mirror (DM) driven by an underlying piezoelectric buzzer array though connection struts is proposed. Piezoelectric buzzer is a very low cost device that is easily commercial available. A numerical model of piezoelectric buzzer was built to predict the displacement of the actuator. The fabrication process without complicated technology was developed. Finally, a DM with 19 actuators arranged hexagonally was fabricated.
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Lei Tian, Lei Tian, Zhengxiong Zhu, Zhengxiong Zhu, Jialian Zhang, Jialian Zhang, Jianqiang Ma, Jianqiang Ma, } "Design and fabrication of deformable mirror driven by piezoelectric buzzer array", Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102555F (8 March 2017); doi: 10.1117/12.2267774; https://doi.org/10.1117/12.2267774
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