Ultra-precision grinding of ferrite is conducted to investigate the removal mechanism. Effect of the accuracy of machine tool key components on grinding surface quality is analyzed. The surface generation model of ferrite ultra-precision grinding machining is established. In order to reveal the surface formation mechanism of ferrite in the process of ultraprecision grinding, furthermore, the scientific and accurate of the calculation model are taken into account to verify the grinding surface roughness, which is proposed. Orthogonal experiment is designed using the high precision aerostatic turntable and aerostatic spindle for ferrite which is a typical hard brittle materials. Based on the experimental results, the influence factors and laws of ultra-precision grinding surface of ferrite are discussed through the analysis of the surface roughness. The results show that the quality of ferrite grinding surface is the optimal parameters, when the wheel speed of 20000r/mm, feed rate of 10mm/min, grinding depth of 0.005mm, and turntable rotary speed of 5r/min, the surface roughness Ra can up to 75nm.