28 February 2017 Acceleration sensing based on graphene resonator
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Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 102562E (2017) https://doi.org/10.1117/12.2257413
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China
Abstract
This paper is concerned with the acceleration sensing based on graphene resonator using finite-element software COMSOL Multiphysics. Based on the ordinary graphene resonator structure, a proof mass is attached to the surface of graphene sheet in order to sense acceleration and force more effectively. The rectangle-shaped gold proof mass is positioned at the center of the graphene sheet. Through COMSOL Multiphysics, the simulations about how the graphene sheet and mass’ dimension affect resonance frequency were performed and proper size parameters for the graphene resonator were chosen. By adopting these parameters, the analysis about the resonance frequency’s change responding to the acceleration or working force was carried out, which lays a foundation for further research of graphene resonator for acceleration sensing.
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Wenbin Jie, Wenbin Jie, Feng Hu, Feng Hu, Xingshu Wang, Xingshu Wang, Shiqiao Qin, Shiqiao Qin, } "Acceleration sensing based on graphene resonator", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102562E (28 February 2017); doi: 10.1117/12.2257413; https://doi.org/10.1117/12.2257413
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