28 February 2017 Fabrication of the asymmetric double-sided concave microlens arrays by femtosecond laser
Author Affiliations +
Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 102563Q (2017) https://doi.org/10.1117/12.2257841
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China
Abstract
In the last decades, fabrication of microlens array in materials with high-damage threshold has attracted increasing interest, especially in the application of high-power laser. In this paper, we propose an advanced strategy to efficiently fabricate microlens array on the surface of glass using a single-pulsed femtosecond laser wet etch process, which is a combination of high-speed laser scanning and the subsequent chemical etch with HF solution. Based on this method, double-sided microlens array, non-regular arrays consisting of close-packed concave microlens array on one side and regular concave MLA on the other side, were fabricated on the 1cm*1cm glass. Especially over one million microlenses could be acquired within an hour, exhibiting great superiority in practical application. Moreover, the optical properties of the asymmetric double-sided MLA were experimentally characterized, and the experimental results reveal the good light homogenization performance.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fan Zhang, Fan Zhang, Qing Yang, Qing Yang, Hao Bian, Hao Bian, Feng Chen, Feng Chen, } "Fabrication of the asymmetric double-sided concave microlens arrays by femtosecond laser", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102563Q (28 February 2017); doi: 10.1117/12.2257841; https://doi.org/10.1117/12.2257841
PROCEEDINGS
6 PAGES


SHARE
Back to Top