Fabrication of 3D electro-thermal micro actuators in silica glass by femtosecond laser wet etch and microsolidics

Qichao Li; Chao Shan; Qing Yang; Feng Chen; Hao Bian; Xun Hou

doi:10.1117/12.2257853

28 February 2017 Fabrication of 3D electro-thermal micro actuators in silica glass by femtosecond laser wet etch and microsolidics

Qichao Li, Chao Shan, Qing Yang, Feng Chen, Hao Bian, Xun Hou

Author Affiliations +

Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 102563S (2017) https://doi.org/10.1117/12.2257853
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China

Abstract

This paper demonstrates a novel electro-thermal micro actuator’s design, fabrication and device tests which combine microfluidic technology and microsolidics process. A three-dimensional solenoid microchannel with high aspect ratio is fabricated inside the silica glass by an improved femtosecond laser wet etch (FLWE) technology, and the diameter of the spiral coil is only 200 μm. Molten alloy (Bi/In/Sn/Pb) with high melting point is injected into the three-dimensional solenoid microchannel inside the silica glass , then it solidifys and forms an electro-thermal micro actuator. The device is capable of achieving precise temperature control and quick response, and can also be easily integrated into MEMS, sensors and ‘lab on a chip’ (LOC) platform inside the fused silica substrate.

Citation Download Citation

Qichao Li, Chao Shan, Qing Yang, Feng Chen, Hao Bian, and Xun Hou "Fabrication of 3D electro-thermal micro actuators in silica glass by femtosecond laser wet etch and microsolidics", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102563S (28 February 2017); https://doi.org/10.1117/12.2257853

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