Optical system alignment has a great influence on the whole system accuracy. In this paper, the processing of optical system alignment was mainly studied, the processing method of optics on the primary and secondary mirrors, front correction lens group and behind correction lens group with high precision centering lathe and internal focusing telescope. Then using the height indicator complete the system alignment of the primary mirror, secondary mirror, front correction group and behind correction group. Finally, based on the zygo interferometer detect the wavefront information. Using this alignment program for catadioptric optical system, the wavefront aberration of optical system, focal length, modulation transfer function (MTF) and other technical indicators have reached the requirements.