28 February 2017 Discussion on method of optical surface roughness measurement
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Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 1025654 (2017) https://doi.org/10.1117/12.2260711
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China
Abstract
In recent years, with the development of modern optics and laser technology, modern industry for optical surface roughness measurement precision of the increasingly high demand, real-time, fast and precise measurement of surface roughness has become constant subject of optical components in processing and test. In this paper, the current method of measuring the surface roughness of optical components were described in detail, including light scattering method, interferometric method, speckle method, and optical stylus method. Besides, the principles and characteristics of different methods were introduced respectively.
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Chunyang Wang, Chunyang Wang, Dongmei Lv, Dongmei Lv, Hongwei Shi, Hongwei Shi, Xuelian Liu, Xuelian Liu, Ruihao Xin, Ruihao Xin, } "Discussion on method of optical surface roughness measurement", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 1025654 (28 February 2017); doi: 10.1117/12.2260711; https://doi.org/10.1117/12.2260711
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