Method and verification for measuring surface roughness of components by angle resolved scattering method

Chunyang Wang; Ruihao Xin; Hongwei Shi; Chengjun Tian; Liang Zhao

doi:10.1117/12.2260713

28 February 2017 Method and verification for measuring surface roughness of components by angle resolved scattering method

Chunyang Wang, Ruihao Xin, Hongwei Shi, Chengjun Tian, Liang Zhao

Author Affiliations +

Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 1025655 (2017) https://doi.org/10.1117/12.2260713
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China

Abstract

This paper introduces the automatic measurement system of laser scattering method based on angular resolution. Discuss the principle of laser in optical element surface scattering, propose the method which use angle resolved scattering (ARS) method to measure surface roughness, at the same time the measurement principle experimental platform is built based on the experimental results after verifying the correctness of the angle resolved scattering method.

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Chunyang Wang, Ruihao Xin, Hongwei Shi, Chengjun Tian, and Liang Zhao "Method and verification for measuring surface roughness of components by angle resolved scattering method", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 1025655 (28 February 2017); https://doi.org/10.1117/12.2260713

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