28 January 1993 Critical materials issues in the performance and manufacturability of LiNbO3 integrated optics
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Proceedings Volume 10267, Integrated Optics and Optoelectronics: A Critical Review; 1026708 (1993) https://doi.org/10.1117/12.141417
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States
Abstract
LiNb03 integrated optics is a sufficiently mature technology that several devices are close to commercial realization. These include high speed modulators, switch arrays, and optical circuitry for the fiber gyroscope and for optical time domain reflectometry. Although the physical principles which underlie the operation of these devices are well understood, predictable and reproducible performance is often difficult to achieve and maintain. This is due to an absence of a detailed understanding of the materials science of LiNb03 and of the processes associated with integrated optics device fabrication. In this presentation I focus on the materials issues which affect the performance, yield, and the design predictability of these devices.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Leon McCaughan, Leon McCaughan, } "Critical materials issues in the performance and manufacturability of LiNbO3 integrated optics", Proc. SPIE 10267, Integrated Optics and Optoelectronics: A Critical Review, 1026708 (28 January 1993); doi: 10.1117/12.141417; https://doi.org/10.1117/12.141417
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