28 December 1993 Micro-optics technology development for advanced sensors
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Advanced-technology-based electro-optical sensors of minimum size and weight require miniaturization of optical, electrical, and mechanical devices with an increasing trend toward integration of various components. Micro-optics technology has the potential in a number of areas to simplify optical design with improved performance. Applications of micro-optics technology for sensor subsystems include internally cooled apertures/windows, hybrid optical design, electronically controlled optical beam steering, and microscopic integration of microoptics, detectors, optical interconnects, and signal-processing layers. Typical components are spherical, aspherical, and dispersive microlenses which simultaneously focus and disperse light. Arrays of dispersive microlenses have potential applications in multicolor focal planes. We discuss the theory, analytical design programs, analog and Fresnel microlens design options, and photolithographic fabrication technologies for micro-optics. Sample results of several microlens types are reported. We also present results of laboratory evaluations of several microlens types that have been fabricated at Lockheed Research and Development Division (R and DD). The microlenses include both wideband and dispersive types, in isolation and in arrays. Different geometries are considered, including square, hexagonal, and skewed microlenses. Results of point-spread-function measurements from our unique micro-optics testbed facility are compared to design predictions.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. Gal, G. Gal, } "Micro-optics technology development for advanced sensors", Proc. SPIE 10271, Diffractive and Miniaturized Optics: A Critical Review, 102710H (28 December 1993); doi: 10.1117/12.170190; https://doi.org/10.1117/12.170190

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