You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
1 January 1994Technology development in the U.S. and Japan: the case of the phase-shifting mask
The status of American competitiveness in high technology, and in particular the semiconductor industry, has been the subject of concern for some time now.1 With the rise of Japanese manufactures to preeminence in the manufacturing of DRAM (Dynamic Random Access Memory) chips during the 1980's, the fundamental assumptions of modern economic theory have been called into question.2 Various factors have been cited by various authors to account for the recent rise in Japanese competitiveness, including industrial policies of the Japanese government, differences in the cost of capital, investments in research and development, and the requirement of American companies to post financial results quarterly.3 There is, however, a real need for concrete case studies, which can examine the actual history of a technology and establish mechanisms of cause and effect.
The alert did not successfully save. Please try again later.
Frank Schellenberg, Dan Okimoto, Jim Raphael, Norihiko Shirouzu, "Technology development in the U.S. and Japan: the case of the phase-shifting mask," Proc. SPIE 10273, 64-to 256-Megabit Reticle Generation: Technology Requirements and Approaches: A Critical Review, 102730F (1 January 1994); https://doi.org/10.1117/12.177435