1 July 1994 Sampling considerations for semiconductor manufacture
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Data collection is implicit in experimentation on and control of semiconductor manufacturing processes, but is often ignored for its effect on the outcome of testing. Improper sampling can increase the cost of testing, either by testing too much, or by increasing the risk of reaching a wrong conclusion; the costs can be significantly more than the cost of measurement, in some cases approaching several million dollars. This paper reviews methods and patterns of sampling. Issues associated with the nested process characteristics of semiconductor manufacturing are discussed, with specific attention to typical distributions. Sample size effects and recommendations are reviewed. The cost of uncertainty associated with sampling is examined. The paper also includes definitions of conunonly-used statistics and tests.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Scott M. Ashkenaz, "Sampling considerations for semiconductor manufacture", Proc. SPIE 10274, Handbook of Critical Dimension Metrology and Process Control: A Critical Review, 102740G (1 July 1994); doi: 10.1117/12.187458; https://doi.org/10.1117/12.187458


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