1 July 1994 Sampling considerations for semiconductor manufacture
Author Affiliations +
Abstract
Data collection is implicit in experimentation on and control of semiconductor manufacturing processes, but is often ignored for its effect on the outcome of testing. Improper sampling can increase the cost of testing, either by testing too much, or by increasing the risk of reaching a wrong conclusion; the costs can be significantly more than the cost of measurement, in some cases approaching several million dollars. This paper reviews methods and patterns of sampling. Issues associated with the nested process characteristics of semiconductor manufacturing are discussed, with specific attention to typical distributions. Sample size effects and recommendations are reviewed. The cost of uncertainty associated with sampling is examined. The paper also includes definitions of conunonly-used statistics and tests.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Scott M. Ashkenaz, "Sampling considerations for semiconductor manufacture", Proc. SPIE 10274, Handbook of Critical Dimension Metrology and Process Control: A Critical Review, 102740G (1 July 1994); doi: 10.1117/12.187458; https://doi.org/10.1117/12.187458
PROCEEDINGS
16 PAGES


SHARE
RELATED CONTENT

"Chemical Safety In The 1980s"
Proceedings of SPIE (November 07 1983)
Continuous flow manufacturing
Proceedings of SPIE (March 01 1991)
Mask-/reticle-making control system
Proceedings of SPIE (July 03 1995)

Back to Top