9 February 1989 Computerized analysis Of high resolution images by scanning acoustic microscopy
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Proceedings Volume 1028, Scanning Imaging; (1989) https://doi.org/10.1117/12.950351
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
High resolution scanning reflection acoustic microscopy is a new scanning technique which provides information about the local elastic properties (both at the surface and in depth) of various kinds of objects. In the present work, two applications of the scanning system (Leitz ELSAM microscope, frequency range: 0.8-2.0 GHz) are considered. The first is the characterization of the adhesion of mouse neuroblastoma cells to a silicon substratum: rings of alternate intensities, originated by acoustic interference fringes, and shown in the cell image, are utilized to obtain information about cell morphology. In the second application, instead, acoustic microscopy is proposed as a non-destructive, inexpensive, and fast technique for characterizing semiconductor devices. The work is focused on the low-level processing (filtering, segmentation, and feature extraction) of the resulting acoustic images, to restore the original information and to measure several features useful in characterizing and understanding an object. The final goal is to determine the acoustic impedance and the acoustic attenuation of the object considered, and, in the case of living cells, to monitor them in time.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniele D. Giusto, Bruno Bianco, Andrea Cambiaso, Massimo Grattarola, Mariateresa Tedesco, "Computerized analysis Of high resolution images by scanning acoustic microscopy", Proc. SPIE 1028, Scanning Imaging, (9 February 1989); doi: 10.1117/12.950351; https://doi.org/10.1117/12.950351
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