9 February 1989 Imaging Theory For The Scanning Optical Microscope
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Proceedings Volume 1028, Scanning Imaging; (1989) https://doi.org/10.1117/12.950320
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
The confocal scanning optical microscope (CSOM) has the major advantages over the standard microscope that it has extremely good range resolution and cross-sectioning capability, somewhat better transverse resolution, and is well adapted to quantitative measurements. The basic reason for the cross-sectioning capability is that the objective lens is illuminated from a collimated beam, as shown in Fig. la, which focuses the beam to a small spot on the object. The light reflected from the object then returns back through the objective lens and a beamsplitter, and is focused to illuminate a pinhole in front of the detector. The beam is defocused by moving the object out of the focal plane. Light at the pinhole is defocused and very little light gets back to the detector. Typically, with a large aperture lens, the 3 dB points of the response are of the order of 500 nm apart.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. S. Kino, G. S. Kino, C-H. Chou, C-H. Chou, G. Q. Xiao, G. Q. Xiao, "Imaging Theory For The Scanning Optical Microscope", Proc. SPIE 1028, Scanning Imaging, (9 February 1989); doi: 10.1117/12.950320; https://doi.org/10.1117/12.950320
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