Infrared Laser Scan Microscope

Eberhard Ziegler; Hans Peter Feuerbaum

doi:10.1117/12.950349

9 February 1989 Infrared Laser Scan Microscope

Eberhard Ziegler, Hans Peter Feuerbaum

Proceedings Volume 1028, Scanning Imaging; (1989) https://doi.org/10.1117/12.950349
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

The infrared laser scan microscope is especially suitable for applications in material science and in the semiconductor industry. The infrared laser beam is deflected in x and y directions by a mirror system and the scanning beam is focussed with the help of a light microscope onto the sample. Four different IR (infrared) lasers can be used; the semiconductor lasers AlGaAs/GaAs with a wavelength of about 820nm and GaInAsP/InP with a wavelength of about 1.3μm and the helium-neon-lasers emitting at 1.152μm and 1.523pμm. The lasers are situated outside the optics and are connected by a special monomode glass fiber. The He-Ne laser, with a wavelength of 1.152μm, is of special significance in the investigation of silicon and ICs because its wavelength exactly corresponds to the energy gap of silicon at room temperature ( 1.07eV ). It is therefore possible to image silicon at different depths, to test devices from the back and, moreover, to produce an OBIC ( Optical Beam Induced Current ) signal from the back of the device.

Citation Download Citation

Eberhard Ziegler and Hans Peter Feuerbaum "Infrared Laser Scan Microscope", Proc. SPIE 1028, Scanning Imaging, (9 February 1989); https://doi.org/10.1117/12.950349

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