Fabrication and performance of optical-interconnect analog-phase holograms made by electron-beam lithography

Paul D. Maker; Daniel W. Wilson; Richard E. Muller

doi:10.1117/12.229275

30 January 1996 Fabrication and performance of optical-interconnect analog-phase holograms made by electron-beam lithography

Paul D. Maker, Daniel W. Wilson, Richard E. Muller

Author Affiliations +

Proceedings Volume 10284, Optoelectronic Interconnects and Packaging: A Critical Review; 102840O (1996) https://doi.org/10.1117/12.229275
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Free space optical interconnect phase holograms fabricated in poly-methyl methacrylate films by direct-write electron beam lithography have been characterized both physically and optically. Performance of holograms containing common fabrication errors is simulated using both Fourier optics and, for a simple one dimensional hologram, a numerical solution of the Helmholtz equation. The degradation of optical performance due to measured fabrication errors and design errors is discussed in view of the simulation results.

Citation Download Citation

Paul D. Maker, Daniel W. Wilson, and Richard E. Muller "Fabrication and performance of optical-interconnect analog-phase holograms made by electron-beam lithography", Proc. SPIE 10284, Optoelectronic Interconnects and Packaging: A Critical Review, 102840O (30 January 1996); https://doi.org/10.1117/12.229275

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available