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30 July 1997 Characterization of optical materials using Auger electron spectroscopy
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Abstract
Auger electron spectroscopy is one of the most commonly used techniques for surface analysis. It has evolved from its first common use for solid surfaces in the late 1960s to become a tool for routine analysis of materials. This article provides a concise review of the use of Auger electron spectroscopy, with emphasis on its use for optical materials. The fundamentals of the technique are reviewed, along with a discussion of data analysis and the equipment commonly used to perform the technique. Several examples of the use of AES for optical materials are discussed.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark R. Davidson and Paul H. Holloway "Characterization of optical materials using Auger electron spectroscopy", Proc. SPIE 10291, Materials Characterization and Optical Probe Techniques: A Critical Review, 102910E (30 July 1997); https://doi.org/10.1117/12.279842
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