PROCEEDINGS VOLUME 10294
SPIE'S INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION | 18-23 JULY 1999
Optical Metrology: A Critical Review
IN THIS VOLUME

1 Sessions, 12 Papers, 0 Presentations
SPIE'S INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION
18-23 July 1999
Denver, CO, United States
Optical Metrology
Proc. SPIE 10294, Front Matter: Volume 10294, 1029401 (19 July 1999); doi: 10.1117/12.2284243
Proc. SPIE 10294, Overview of variable-angle spectroscopic ellipsometry (VASE): I. Basic theory and typical applications, 1029402 (19 July 1999); doi: 10.1117/12.351660
Proc. SPIE 10294, In-situ ellipsometry: applications to thin film research, development, and production, 1029403 (19 July 1999); doi: 10.1117/12.351666
Proc. SPIE 10294, Overview of variable-angle spectroscopic ellipsometry (VASE): II. Advanced applications, 1029404 (19 July 1999); doi: 10.1117/12.351667
Proc. SPIE 10294, Optical scatter measurements and their application to surface metrology, 1029406 (19 July 1999); doi: 10.1117/12.351668
Proc. SPIE 10294, Optical scatterometry for process metrology, 1029407 (19 July 1999); doi: 10.1117/12.351669
Proc. SPIE 10294, Milestones and future directions in applications of optical scatterometry, 1029408 (19 July 1999); doi: 10.1117/12.351670
Proc. SPIE 10294, Time-resolved scanning Kerr microscopy in magnetic dynamics investigations, 102940C (19 July 1999); doi: 10.1117/12.351661
Proc. SPIE 10294, Multitype surface and thin film characterization using light scattering, scanning force microscopy, and white light interferometry, 102940E (19 July 1999); doi: 10.1117/12.351662
Proc. SPIE 10294, High-resolution imaging of heterogeneous surfaces with multifunctional NSOM, 102940F (19 July 1999); doi: 10.1117/12.351663
Proc. SPIE 10294, Nonlinear optical characterization of organic materials, 102940G (19 July 1999); doi: 10.1117/12.351664
Proc. SPIE 10294, Analysis of low dielectric constant and Cu-based single- and multilayered films using spectroscopic ellipsometry, 102940H (19 July 1999); doi: 10.1117/12.351665
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