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PROCEEDINGS VOLUME 10310
SPIE INSTITUTES FOR ADVANCED OPTICAL TECHNOLOGIES 10 | 3-3 OCTOBER 1993
Technology of Proximal Probe Lithography
Editor(s): Christie R. K. Marrian
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1 Sessions, 19 Papers, 0 Presentations, 0 Posters
Technology of Proximal Probe Lithography  (19)
SPIE INSTITUTES FOR ADVANCED OPTICAL TECHNOLOGIES 10
3-3 October 1993
Bellingham, WA, United States
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Technology of Proximal Probe Lithography
Front Matter: Volume 10310 Open Access Paper
Proceedings Volume Technology of Proximal Probe Lithography, 1031001 (1993) https://doi.org/10.1117/12.2283725
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Technology of proximal probe lithography: an overview Paper
Proceedings Volume Technology of Proximal Probe Lithography, 1031002 (1993) https://doi.org/10.1117/12.183184
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Principles and techniques of STM lithography Paper
Mark A. McCord, Roger Fabian W. Pease
Proceedings Volume Technology of Proximal Probe Lithography, 1031003 (1993) https://doi.org/10.1117/12.183194
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Role of scanning probe microscopes in the development of nanoelectric devices Paper
Arunava Majumdar, Stuart M. Lindsay
Proceedings Volume Technology of Proximal Probe Lithography, 1031004 (1993) https://doi.org/10.1117/12.183195
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Low voltage E-beam lithography with the STM Paper
Proceedings Volume Technology of Proximal Probe Lithography, 1031005 (1993) https://doi.org/10.1117/12.183196
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Nanolithography and atomic manipulation on silicon surfaces by STM Paper
Francois Grey, A. Kobayashi, H. Uchida, D. H. Huang, M. Aono
Proceedings Volume Technology of Proximal Probe Lithography, 1031006 (1993) https://doi.org/10.1117/12.183197
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Scanning tunneling microscope-based fabrication and characteerization on passivated semiconductor surfaces Paper
John A. Dagata, Jason Schneir
Proceedings Volume Technology of Proximal Probe Lithography, 1031007 (1993) https://doi.org/10.1117/12.183198
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Scanning tunneling microscope-based nanolithography for electronic device fabrication Paper
Joseph W. Lyding, Roger T. Brockenbrough, Patrick J. Fay, John R. Tucker, Karl Hess
Proceedings Volume Technology of Proximal Probe Lithography, 1031008 (1993) https://doi.org/10.1117/12.183199
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Arrayed lithography using STM-based microcolumns Paper
T. H. Philip Chang, Lawrence P. Muray, Urs Staufer, Mark A. McCord, Dieter P. Kern
Proceedings Volume Technology of Proximal Probe Lithography, 1031009 (1993) https://doi.org/10.1117/12.183200
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Nanofabrication by scanning probe instruments: methods, potentail applications and key issues Paper
Proceedings Volume Technology of Proximal Probe Lithography, 103100A (1993) https://doi.org/10.1117/12.183201
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Direct writing of metallic nanostructures with the scanning tunneling microscope Paper
Alejandro L. de Lozanne, W. F. Smith, E. E. Ehrichs
Proceedings Volume Technology of Proximal Probe Lithography, 103100B (1993) https://doi.org/10.1117/12.183185
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Fabrication of nanometer scale structures Paper
Mahir A. Nayfeh
Proceedings Volume Technology of Proximal Probe Lithography, 103100C (1993) https://doi.org/10.1117/12.183186
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Modification and manipulation of layered materials using scanned probe microscopies Paper
Charles Lieber
Proceedings Volume Technology of Proximal Probe Lithography, 103100D (1993) https://doi.org/10.1117/12.183187
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Atomic force microscopy experimentation at surfaces: hardness, wear and lithographic applications Paper
T. A. Jung, A. Moser, Michael T. Gale, H. J. Hug, U. D. Schwarz
Proceedings Volume Technology of Proximal Probe Lithography, 103100E (1993) https://doi.org/10.1117/12.183188
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Fabrication and characterization using scanned nanoprobes Paper
Grover C. Wetsel, Sterling E. McBride, Herschel M. Marchman
Proceedings Volume Technology of Proximal Probe Lithography, 103100F (1993) https://doi.org/10.1117/12.183189
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Ballistic electron emission microscopy: from electron transport physics to nanoscale materials science Paper
Proceedings Volume Technology of Proximal Probe Lithography, 103100G (1993) https://doi.org/10.1117/12.183190
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Generating and measuring displacements up to 0.1m to an accuracy of0.1 nm: is it possible? Paper
E. Clayton Teague
Proceedings Volume Technology of Proximal Probe Lithography, 103100H (1993) https://doi.org/10.1117/12.183191
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Metrology with scanning probe microscopes Paper
Joseph E. Griffith, David A. Grigg, G. P. Kochanski, Michael J. Vasile, Phillip E. Russell
Proceedings Volume Technology of Proximal Probe Lithography, 103100I (1993) https://doi.org/10.1117/12.183192
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Metrology applications of scanning probe microscopes Paper
Leigh Ann Files-Sesler, John N. Randall, Francis G. Celii
Proceedings Volume Technology of Proximal Probe Lithography, 103100J (1993) https://doi.org/10.1117/12.183193
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