3 October 1993 Technology of proximal probe lithography: an overview
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Proceedings Volume 10310, Technology of Proximal Probe Lithography; 1031002 (1993) https://doi.org/10.1117/12.183184
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States
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John A. Dagata, John A. Dagata, Christie R. Marrian, Christie R. Marrian, } "Technology of proximal probe lithography: an overview", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031002 (3 October 1993); doi: 10.1117/12.183184; https://doi.org/10.1117/12.183184
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