Low voltage E-beam lithography with the STM

Christie R. Marrian; Elizabeth A. Dobisz; John A. Dagata

doi:10.1117/12.183196

3 October 1993 Low voltage E-beam lithography with the STM

Christie R. Marrian, Elizabeth A. Dobisz, John A. Dagata

Proceedings Volume 10310, Technology of Proximal Probe Lithography; 1031005 (1993) https://doi.org/10.1117/12.183196
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States

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Christie R. Marrian, Elizabeth A. Dobisz, and John A. Dagata "Low voltage E-beam lithography with the STM", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031005 (3 October 1993); https://doi.org/10.1117/12.183196

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