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3 October 1993 Low voltage E-beam lithography with the STM
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Proceedings Volume 10310, Technology of Proximal Probe Lithography; 1031005 (1993) https://doi.org/10.1117/12.183196
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States
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© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christie R. Marrian, Elizabeth A. Dobisz, and John A. Dagata "Low voltage E-beam lithography with the STM", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031005 (3 October 1993); https://doi.org/10.1117/12.183196
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