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3 October 1993 Nanolithography and atomic manipulation on silicon surfaces by STM
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Proceedings Volume 10310, Technology of Proximal Probe Lithography; 1031006 (1993) https://doi.org/10.1117/12.183197
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States
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© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Francois Grey, A. Kobayashi, H. Uchida, D. H. Huang, and M. Aono "Nanolithography and atomic manipulation on silicon surfaces by STM", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031006 (3 October 1993); https://doi.org/10.1117/12.183197
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