3 October 1993 Fabrication of nanometer scale structures
Author Affiliations +
Proceedings Volume 10310, Technology of Proximal Probe Lithography; 103100C (1993) https://doi.org/10.1117/12.183186
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States
There is no online version at this time. The PDF is only available to people who have bought the paper or have a subscription.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mahir A. Nayfeh, Mahir A. Nayfeh, } "Fabrication of nanometer scale structures", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100C (3 October 1993); doi: 10.1117/12.183186; https://doi.org/10.1117/12.183186

Back to Top