3 October 1993 Fabrication of nanometer scale structures
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Proceedings Volume 10310, Technology of Proximal Probe Lithography; 103100C (1993) https://doi.org/10.1117/12.183186
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States
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Mahir A. Nayfeh, Mahir A. Nayfeh, } "Fabrication of nanometer scale structures", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100C (3 October 1993); doi: 10.1117/12.183186; https://doi.org/10.1117/12.183186
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