3 October 1993 Atomic force microscopy experimentation at surfaces: hardness, wear and lithographic applications
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Proceedings Volume 10310, Technology of Proximal Probe Lithography; 103100E (1993) https://doi.org/10.1117/12.183188
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States
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T. A. Jung, T. A. Jung, A. Moser, A. Moser, Michael T. Gale, Michael T. Gale, H. J. Hug, H. J. Hug, U. D. Schwarz, U. D. Schwarz, } "Atomic force microscopy experimentation at surfaces: hardness, wear and lithographic applications", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100E (3 October 1993); doi: 10.1117/12.183188; https://doi.org/10.1117/12.183188
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