Fabrication and characterization using scanned nanoprobes

Grover C. Wetsel; Sterling E. McBride; Herschel M. Marchman

doi:10.1117/12.183189

3 October 1993 Fabrication and characterization using scanned nanoprobes

Grover C. Wetsel, Sterling E. McBride, Herschel M. Marchman

Proceedings Volume 10310, Technology of Proximal Probe Lithography; 103100F (1993) https://doi.org/10.1117/12.183189
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States

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Grover C. Wetsel, Sterling E. McBride, and Herschel M. Marchman "Fabrication and characterization using scanned nanoprobes", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100F (3 October 1993); https://doi.org/10.1117/12.183189

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