Metrology with scanning probe microscopes

Joseph E. Griffith; David A. Grigg; G. P. Kochanski; Michael J. Vasile; Phillip E. Russell

doi:10.1117/12.183192

3 October 1993 Metrology with scanning probe microscopes

Joseph E. Griffith, David A. Grigg, G. P. Kochanski, Michael J. Vasile, Phillip E. Russell

Proceedings Volume 10310, Technology of Proximal Probe Lithography; 103100I (1993) https://doi.org/10.1117/12.183192
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States

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Joseph E. Griffith, David A. Grigg, G. P. Kochanski, Michael J. Vasile, and Phillip E. Russell "Metrology with scanning probe microscopes", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100I (3 October 1993); https://doi.org/10.1117/12.183192

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