29 August 2017 INO MEMS Foundry
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Proceedings Volume 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging; 1031323 (2017) https://doi.org/10.1117/12.2283871
Event: Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 2002, Ottawa, Ontario, Canada
Abstract
Microfabrication for integrated MEMS is the art of combining micro electronic circuits with micro optics, mechanics, fluidics, sensing and other technologies. To meet the diversified requirements for MEMS (Micro Electro Mechanical Systems) and MOEMS (Micro Opto Electro Mechanical Systems), a broad spectrum of materials and fabrication processes must be available. INO is the only entity offering MEMS foundry-type services in Canada. These services include design, prototyping, fabrication of mini-series, packaging and testing of various MEMS.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christine Alain, Christine Alain, } "INO MEMS Foundry", Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 1031323 (29 August 2017); doi: 10.1117/12.2283871; https://doi.org/10.1117/12.2283871
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