29 August 2017 Process integration of direct detection X-ray imaging arrays using a-Si:H technology
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Proceedings Volume 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging; 1031340 (2017) https://doi.org/10.1117/12.2283940
Event: Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 2002, Ottawa, Ontario, Canada
Abstract
Hydrogenated amorphous silicon (a-Si:H) has been widely used in low-temperature large area electronics such as solar cells, active-matrix liquid crystal displays (AMLCDs), and optical or X-ray image sensors for medical applications [1]. In particular, image sensors for diagnostic X-ray imaging are a very promising technology for creation of digital X-ray images, which can potentially replace conventional film imaging technique.
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Czang-Ho Lee, Czang-Ho Lee, } "Process integration of direct detection X-ray imaging arrays using a-Si:H technology", Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 1031340 (29 August 2017); doi: 10.1117/12.2283940; https://doi.org/10.1117/12.2283940
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