29 August 2017 Development of MOEMS and micro optical components at INO
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Proceedings Volume 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging; 103134D (2017) https://doi.org/10.1117/12.2283953
Event: Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 2002, Ottawa, Ontario, Canada
Abstract
Aggressive R&D and commercialization programs targeting various types of micromirror-based micro-opto- electromechanical systems (MOEMS) have been realized at INO. These activities are accompanied by development of enabling technologies and selected micro-optical components such as various types of diffractive optical elements and refractive microlens arrays. Micro-optics technology development was considered essential for the manufacturing of functional devices and instruments making use of MOEMS. Moreover, a strong contribution from INO's optical design group was also solicited for the development of application specific optical and optomechanical components. These created a required critical mass for rapid development of selected manufacturing methods and particular components and devices. All the microfabrication activities are conducted in INO's 6,500 square foot clean room facility fully equipped for processing of Si and other material wafers with a diameter up to 150 mm.
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Hubert Jerominek, Hubert Jerominek, } "Development of MOEMS and micro optical components at INO", Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 103134D (29 August 2017); doi: 10.1117/12.2283953; https://doi.org/10.1117/12.2283953
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