29 August 2017 In-plane electro-thermally actuated optical switches
Author Affiliations +
Proceedings Volume 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging; 103134Q (2017) https://doi.org/10.1117/12.2283966
Event: Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 2002, Ottawa, Ontario, Canada
Abstract
In this paper, we introduce the design of a microshutter based on the electro-thermally actuated mechanism. The U-shaped folded beam device consists of a "wide cold" beam and a "narrow hot" beam. The end of the beam is a blade structure, which serves as the shutter part. When current is passed through the microshutter between two mechanically anchored electrode pads, the non-uniform Joule heating causes the whole structure to bend toward the "wide cold" beam. Also in this paper, we present a study and design of a novel bi-directional microswitch. The design has two identical beams and can bend in two directions by controlling the direction of the applied current. Finite element modeling (FEM) is used to visualize the function of these devices. The geometry of the membrane and the structure play important roles in the functionality of these devices.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun Li, Jun Li, } "In-plane electro-thermally actuated optical switches", Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 103134Q (29 August 2017); doi: 10.1117/12.2283966; https://doi.org/10.1117/12.2283966
PROCEEDINGS
3 PAGES


SHARE
Back to Top