19 May 2003 Development and demonstration of precision optical contouring by wet etch figuring
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Abstract
Wet etch figuring (WEF) utilizes surface tension gradients to confine and stabilize the footprint of an etchant solution contacting an optic, and uses real-time optical interferometry for closed-loop control the local dwell time of etchant on the optic. This enables precision figuring of arbitrary continuous contour optical shapes with gradients of up to 0.5 waves/ mm. This stress-free figuring method enables the figuring of ultrathin optics, and allows inexpensive thin sheet glass to become raw material for precision optics such as phase plates, aberration correctors and beam shapers. We present data on surfaces generated and discuss surface smoothness of optics manufactured by WEF.
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J. A. Britten, J. A. Britten, } "Development and demonstration of precision optical contouring by wet etch figuring", Proc. SPIE 10314, Optifab 2003: Technical Digest, 1031407 (19 May 2003); doi: 10.1117/12.2283996; https://doi.org/10.1117/12.2283996
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