19 May 2003 Magnetorheological finishing of a diamond turned poly(methylmethacrylate) flat
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Abstract
Magnetorheological finishing (MRF) of a diamond turned poly(methymethacrylate) (PMMA) flat was demonstrated using a commercial Q22Y MRF machine and a zirconia-based magnetorheological (MR) fluid. The surface of a 38mm diameter by 7.6mm thick puck was processed in a sequence of two figure correction runs. The initial p-v wave front error of 4.5[tm was reduced to 0.35 lam, and the average rms surface micro-roughness was reduced from 3.8nm to 0.47nm. The diamond turning marks were eliminated
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Jessica E. DeGroote, Jessica E. DeGroote, } "Magnetorheological finishing of a diamond turned poly(methylmethacrylate) flat", Proc. SPIE 10314, Optifab 2003: Technical Digest, 103140N (19 May 2003); doi: 10.1117/12.2284012; https://doi.org/10.1117/12.2284012
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