19 May 2003 Polishing rate of fused silica, compared to glasses BK7 and SF6
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Abstract
We discuss micromechanics contributions to the loose abrasive polishing removal rate in fused silica, and the multicomponent glasses (crown) BK7 and (flint) SF6. Nanoindentation reveals the contributions of hardness at depths in the range 2-6 nm.
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John C. Lambropoulos, "Polishing rate of fused silica, compared to glasses BK7 and SF6", Proc. SPIE 10314, Optifab 2003: Technical Digest, 103140Q (19 May 2003); doi: 10.1117/12.2284015; https://doi.org/10.1117/12.2284015
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