19 May 2003 Grain decoration in aluminum oxynitride (ALON) from polishing on bound abrasive laps
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Abstract
Aluminum oxynitride (ALON) is a material with desirable qualities for a variety of applications that has proven difficult to polish because of its grain structure. Bound abrasives may prove to be an effective means of polishing it, and work is being done with them to obtain good surfaces on ALON, with reasonable removal rates. Laps consisting of abrasives bound in epoxy matrices have been created for polishing ALON. The effects of varying abrasive type, abrasive concentration, lap shape, coolant and load are being studied. Metrology procedures are being developed to monitor different aspects of the grain structure and numerically evaluate its decoration. Strategies have been developed to polish ALON at acceptable rates with reasonably good surface quality. Work is directed toward finding optimal bound abrasive lap formulations that can be fabricated into ring and/or contour tools for testing on CNC machining platforms.
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Anne E. Marino, Anne E. Marino, } "Grain decoration in aluminum oxynitride (ALON) from polishing on bound abrasive laps", Proc. SPIE 10314, Optifab 2003: Technical Digest, 103140S (19 May 2003); doi: 10.1117/12.2284017; https://doi.org/10.1117/12.2284017
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