19 May 2003 Combining optical metrology with mechanical analysis
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Abstract
Mechanical analysis can be useful in support of optical tests. Comparison of test and analysis improves the understanding and confidence in both. Tools are available to convert finite element (FE) results into a format compatible with interferogram test arrays for easy correlation.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Victor Genberg, "Combining optical metrology with mechanical analysis", Proc. SPIE 10314, Optifab 2003: Technical Digest, 1031412 (19 May 2003); doi: 10.1117/12.2284027; https://doi.org/10.1117/12.2284027
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