We present a number of measurement methods that we use in the fabrication of solid LiNbO3 etalons. Several unique technical features, such as high finesse, large aperture/high aspect ratio, and tunability, require careful monitoring of quality parameters throughout the production process. We point out the critical issues and how we monitor them.
"Metrology challenges of thin optical wafers for high finesse etalons", Proc. SPIE 10314, Optifab 2003: Technical Digest, 1031414 (19 May 2003); doi: 10.1117/12.2284029; https://doi.org/10.1117/12.2284029