Nanoprecision mechanical fabrication for optical elements

H. Ohmori

doi:10.1117/12.2284043

19 May 2003 Nanoprecision mechanical fabrication for optical elements

H. Ohmori

Proceedings Volume 10314, Optifab 2003: Technical Digest; 103141I (2003) https://doi.org/10.1117/12.2284043
Event: OptiFab 2003, 2003, Rochester, NY, United States

Abstract

Through advanced research activities on ultra/nanoprecision and high-quality surface machining processes, required for the fabrication of advanced functional devices, we launched the research and development of a new field of nanoprecision mechanical fabrication technologies for optical elements together with on-machine measurement and evaluation techniques, aiming at a wide variety of materials, and precision and scale ranging from micrometer to nanometer level, to meet scientific, practical and applied industrial needs. This paper introduces their activities for optical elements.

Citation Download Citation

H. Ohmori "Nanoprecision mechanical fabrication for optical elements", Proc. SPIE 10314, Optifab 2003: Technical Digest, 103141I (19 May 2003); https://doi.org/10.1117/12.2284043

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