19 May 2003 Nanoprecision mechanical fabrication for optical elements
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Abstract
Through advanced research activities on ultra/nanoprecision and high-quality surface machining processes, required for the fabrication of advanced functional devices, we launched the research and development of a new field of nanoprecision mechanical fabrication technologies for optical elements together with on-machine measurement and evaluation techniques, aiming at a wide variety of materials, and precision and scale ranging from micrometer to nanometer level, to meet scientific, practical and applied industrial needs. This paper introduces their activities for optical elements.
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H. Ohmori, H. Ohmori, } "Nanoprecision mechanical fabrication for optical elements", Proc. SPIE 10314, Optifab 2003: Technical Digest, 103141I (19 May 2003); doi: 10.1117/12.2284043; https://doi.org/10.1117/12.2284043
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