Through advanced research activities on ultra/nanoprecision and high-quality surface machining processes, required for the fabrication of advanced functional devices, we launched the research and development of a new field of nanoprecision mechanical fabrication technologies for optical elements together with on-machine measurement and evaluation techniques, aiming at a wide variety of materials, and precision and scale ranging from micrometer to nanometer level, to meet scientific, practical and applied industrial needs. This paper introduces their activities for optical elements.
H. Ohmori, H. Ohmori,
"Nanoprecision mechanical fabrication for optical elements", Proc. SPIE 10314, Optifab 2003: Technical Digest, 103141I (19 May 2003); doi: 10.1117/12.2284043; https://doi.org/10.1117/12.2284043