A novel polishing head with a gimbals-like structure for the high-speed polishing process

Hocheol Lee; Namyoung Lee; Changkyu Song; Husang Lee; Youngjae Shin; Chunhong Park

doi:10.1117/12.605813

2 May 2005 A novel polishing head with a gimbals-like structure for the high-speed polishing process; Technical Digest

Hocheol Lee, Namyoung Lee, Changkyu Song, Husang Lee, Youngjae Shin, Chunhong Park

Proceedings Volume 10315, Optifab 2005: Technical Digest; 103150Q (2005) https://doi.org/10.1117/12.605813
Event: Optifab 2005, 2005, Rochester, NY, United States

Abstract

In this paper, we suggest a polishing head with a mechanical gimbals-like structure for the optics fabrication. In the small tool polishing processes, several types of polishing mechanism have been tried to get more deterministic and high efficient optical fabrication. The conventional polishing processes to use the contacting pad material of polyurethane or pitch need the higher polishing rate to shorten the overall polishing time for large optics. Therefore, new polishing head mechanism is designed to use the air backpressure and gimbals-like hinge structure to increase polishing velocity. In the following experiment, mechanical adaptability was confirmed both on the flat glass and the convex aluminum surface.

Citation Download Citation

Hocheol Lee, Namyoung Lee, Changkyu Song, Husang Lee, Youngjae Shin, and Chunhong Park "A novel polishing head with a gimbals-like structure for the high-speed polishing process; Technical Digest", Proc. SPIE 10315, Optifab 2005: Technical Digest, 103150Q (2 May 2005); https://doi.org/10.1117/12.605813

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