2 May 2005 A novel polishing head with a gimbals-like structure for the high-speed polishing process; Technical Digest
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Abstract
In this paper, we suggest a polishing head with a mechanical gimbals-like structure for the optics fabrication. In the small tool polishing processes, several types of polishing mechanism have been tried to get more deterministic and high efficient optical fabrication. The conventional polishing processes to use the contacting pad material of polyurethane or pitch need the higher polishing rate to shorten the overall polishing time for large optics. Therefore, new polishing head mechanism is designed to use the air backpressure and gimbals-like hinge structure to increase polishing velocity. In the following experiment, mechanical adaptability was confirmed both on the flat glass and the convex aluminum surface.
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Hocheol Lee, Hocheol Lee, Namyoung Lee, Namyoung Lee, Changkyu Song, Changkyu Song, Husang Lee, Husang Lee, Youngjae Shin, Youngjae Shin, Chunhong Park, Chunhong Park, } "A novel polishing head with a gimbals-like structure for the high-speed polishing process; Technical Digest", Proc. SPIE 10315, Optifab 2005: Technical Digest, 103150Q (2 May 2005); doi: 10.1117/12.605813; https://doi.org/10.1117/12.605813
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