Effects of glass mechanical properties on polishing

Shai N. Shafrir; John C. Lambropoulos

doi:10.1117/12.609255

2 May 2005 Effects of glass mechanical properties on polishing; Technical Digest

Proceedings Volume 10315, Optifab 2005: Technical Digest; 1031515 (2005) https://doi.org/10.1117/12.609255
Event: Optifab 2005, 2005, Rochester, NY, United States

Abstract

Our goal is to better understand the effects of glass mechanical properties, such as hardness, Young's modulus and fracture toughness, on the material removal rate during polishing. We have focused on eleven types of commercial Ohara optical glasses that cover the entire spectrum of the glass table. Conventional polishing experiments were performed to study the correlation between the process parameters (i.e., polishing pad, nominal load and slurry particle size) to the material removal rate and surface roughness. The results demonstrate how a material figure of merit affects the glass material removal rate. We review past results acquired at the Center for Optics Manufacturing as well as the work of others. The data presented demonstrate the controllability of the polishing process based on the known mechanical properties of any glass material.

Citation Download Citation

Shai N. Shafrir and John C. Lambropoulos "Effects of glass mechanical properties on polishing; Technical Digest", Proc. SPIE 10315, Optifab 2005: Technical Digest, 1031515 (2 May 2005); https://doi.org/10.1117/12.609255

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