2 May 2005 Effects of glass mechanical properties on polishing; Technical Digest
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Abstract
Our goal is to better understand the effects of glass mechanical properties, such as hardness, Young's modulus and fracture toughness, on the material removal rate during polishing. We have focused on eleven types of commercial Ohara optical glasses that cover the entire spectrum of the glass table. Conventional polishing experiments were performed to study the correlation between the process parameters (i.e., polishing pad, nominal load and slurry particle size) to the material removal rate and surface roughness. The results demonstrate how a material figure of merit affects the glass material removal rate. We review past results acquired at the Center for Optics Manufacturing as well as the work of others. The data presented demonstrate the controllability of the polishing process based on the known mechanical properties of any glass material.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shai N. Shafrir, Shai N. Shafrir, John C. Lambropoulos, John C. Lambropoulos, "Effects of glass mechanical properties on polishing; Technical Digest", Proc. SPIE 10315, Optifab 2005: Technical Digest, 1031515 (2 May 2005); doi: 10.1117/12.609255; https://doi.org/10.1117/12.609255
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